氢气与Cu中间层对GZO薄膜光电性能的影响
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film
Fig. 3 #cod#x003b1;h #cod#x003bd; 2 -h #cod#x003bd; relation for GZO films deposited at room temperature in different H 2 fluxes
氢气与Cu中间层对GZO薄膜光电性能的影响 |
| 吕坤, 祝柏林, 李珂, 胡文超, 谢铭, 吴隽 |
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film |
| 图3 在室温、不同H 2 流量下制备的GZO薄膜 #cod#x003b1; h #cod#x003bd; 2 -h #cod#x003bd; 曲线 Fig. 3 #cod#x003b1;h #cod#x003bd; 2 -h #cod#x003bd; relation for GZO films deposited at room temperature in different H 2 fluxes |
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